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 NameCategory1st responsible2nd responsibleManufacturerModel
View Batch Buffer Oxide Etching 1-7 MOSProcédés humides / Wet process benchesJean-Baptiste DoucetTom Gouveiato be precisedto be checked
View left organic solvents fume hood with lowerable windowProcédés humides / Wet process benchesJean-Baptiste DoucetTom GouveiaFluidairto be checked
View wet bench with Spin Rinse Dryer Procédés humides / Wet process benchesJean-Baptiste DoucetTom GouveiaCoillardto be checked
View AASElectrochimie/electroplatingDavid Bourrier Perkin ElmerAAnalyst 400 AA
View acid wet bench for multicleaning and etchingProcédés humides / Wet process benchesJean-Baptiste DoucetTom GouveiaPTS092018-001
View AFM DIMENSION (C-AFM)Caractérisation / characterizationBenjamin ReigEmmanuelle DaranVEECODimension 3100
View AFM ICON (C-AFM)Caractérisation / characterizationBenjamin ReigEmmanuelle DaranBRUKERDimension ICON
View ALCATEL P1 (G-ALCA)Gravure plasma / Plasma etchingAurélie LECESTRElaurent bouscayrolALCATEL-ADIXENAMS4200-P1
View ALCATEL P4 (G-ALCA)Gravure plasma / Plasma etchingAurélie LECESTRElaurent bouscayrolAlcatel - AdixenAMS4200
View ALD (T-ALD)Other processesPascal Dubreuilscheid emmanuelCambridge NanotechFiji F200
View Aligneur Suss (A-WAFB)Integration/ Device mountingSamuel CharlotSamuel CharlotSUSSBA8
View Altadrop (J-JET)Jet d'encre / ink jetfabien mesnilgrenteVéronique ConédéraAltatechAltadrop
View ApSy E100 (D-EVAP)PVDLudovic SalvagnacGuillaume LibaudeApplication SystemesE100
View Aspiration centraliséeSupport salle blancheAntoine MaioranoThierry Docontoaxpirtech aldesaxpirtechh FH34-2
View Auroless (E-MANU)Electrochimie/electroplatingDavid Bourrier Minaservices4"
View balanceCaractérisation / characterizationfabien mesnilgrenteVéronique ConédéraMettlerAE100
View Boucle de refroidissementSupport salle blancheAntoine MaioranoThierry DocontoSPIEXXX
View carotteuse ultra soniqueAssemblage / Device mountingSamuel CharlotSamuel Charlotfishione170
View Centrale Eau DISupport salle blancheAntoine MaioranoThierry DocontoC2RLAAS 2005
View Ceradrop (J-JET)Jet d'encre / ink jetfabien mesnilgrenteVéronique ConédéraCeradropF-Series
View clean wet bench organic solventsProcédés humides / Wet process benchesJean-Baptiste DoucetTom GouveiaDV TechHotte
View Cvs Electrochimie/electroplatingDavid Bourrier MetrhomCvs
View D8-Discover (C-MEB)Epitaxie / EpitaxyAlexandre Arnoultquentin gravelierBruker AXSD8-Discover (Da Vinci)
View DIENER plasma O2 (G-PLAS)Gravure plasma / Plasma etchingAurélie LECESTRElaurent bouscayrolDIENERNano
View DigidropCaractérisation / characterizationBenjamin Reigfabien mesnilgrenteGBX InstrumentDigidrop
View DILASE 3D (L-DILA)Lithographie laser / Laser lithographyPierre-François CalmonRémi CoursonKLOEDilase 3D
View DILASE 3D MR (L-DILA)Lithographie laser / Laser lithographyPierre-François CalmonRémi CoursonKLOEDilase 3DMR
View DILASE 650 (L-DILA)Lithographie laser / Laser lithographyPierre-François CalmonDavid ColinKLOEDILASE 650
View DILASE 750 (L-DILA)Lithographie laser / Laser lithographyPierre-François CalmonDavid ColinKLOEDILASE 750
View dilute or buffered HF etching including metalized wafers Procédés humides / Wet process benchesJean-Baptiste DoucetTom GouveiaVACOto be checked
View DSC (C-MEB)Caractérisation / characterizationBenjamin Reig NETZSCHDSC 404 F3 Pegasus
View DWL 200 (L-DLW)Lithographie laser / Laser lithographyPierre-François CalmonDavid ColinHEIDELBERG INSTRUMENTSDWL 200
View Edwards Poly (D-EVAP)PVDLudovic SalvagnacGuillaume LibaudeEdwardsEdwards Auto 500
View ellipsomètre AutoEL (C-ELLI)Caractérisation / characterizationBenjamin ReigEric ImbernonRandolph ResearchAutoEL
View Ellipsomètre HJY (C-ELLI)Caractérisation / characterizationBenjamin ReigEric ImbernonHoriba Jobin YvonUvisel
View encolleuseIntegration/ Device mountingSamuel CharlotSamuel CharlotJanomeGLT JR2400N
View Etchlab 200 (G-TRIK)Gravure plasma / Plasma etchingAurélie LECESTRElaurent bouscayrolSENTECHEtchlab 200
View étuve HMDS autoPhotolithographie / PhotolithographyLaurent MazenqAdrian LabordeYesYes
View étuve HMDS manuelPhotolithographie / PhotolithographyLaurent MazenqAdrian LabordeYesYes
View Etuve HoroAssemblage / Device mountingSamuel CharlotSamuel CharlotHORO250
View étuve MEMMERTIntegration/ Device mountingSamuel CharlotSamuel CharlotMemmertUFB400
View étuve polymèresPhotolithographie / PhotolithographyLaurent MazenqAdrian LabordeMemmertXXXX
View Etuve TETHYSAssemblage / Device mountingSamuel CharlotSamuel CharlotTETHYSFisher-Band
View étuve ThermoAssemblage / Device mountingSamuel CharlotSamuel CharlotThermo scientificVacutherm
View Etuve vieillissement thermiqueIntegration/ Device mountingSamuel CharlotSamuel CharlotSecasiBC21
View EVA 600 Evaporation (D-EVAP)PVDLudovic SalvagnacGuillaume LibaudeAlliance ConceptEVA 600
View EVG120 (P-PIST)Photolithographie / PhotolithographyAdrian LabordeLaurent MazenqEVG120
View EVG620 (P-AUTO)Photolithographie / PhotolithographyAdrian LabordeLaurent MazenqEVG620
View Fer à souder WellerAssemblage / Device mountingSamuel CharlotSamuel CharlotWellerWSD81
View FIB Dual Beam (C-FIB)Caractérisation / characterizationBenjamin ReigFranck CarcenacFEIHelios 600i
View Film monter UH-115 Assemblage / Device mountingSamuel CharlotSamuel CharlotUltron Systems, Inc.UH-115
View Four AET Bore (T-OXYD)Oxydation Eric ImbernonJean Christophe MarrotAETFour d'oxydation
View Four AET Phosphore (T-OXYD)Oxydation Eric ImbernonJean Christophe MarrotAETFour d'oxydation
View Four AET Propre (T-OXYD)Oxydation Eric ImbernonJean Christophe MarrotAETFour d'oxydation
View Four AET Reve (T-LPCV)LPCVDscheid emmanuelEric ImbernonAETSEP - 28486
View Four Alox (T-OXYD)Oxydation Guilhem Almuneau AETFour d'oxydation
View Four de refusion (A-SERI)Integration/ Device mountingSamuel CharlotSamuel CharlotMadellTYR108C
View Four DIFPHOS6 (T-RRD)redistribution, diffusionEric ImbernonJean Christophe MarrotCentrothermCentronic E1550HT
View Four OXYBORE6 (T-OXYD)Oxydation Eric ImbernonJean Christophe MarrotCentrothermCentronic E1550HT
View Four OXYNIT6 (T-LPCV)LPCVDEric ImbernonPascal DubreuilCentrothermCentronic E1550HT
View Four OXYPHOS6 (T-OXYD)Oxydation Eric ImbernonJean Christophe MarrotCentrothermCentronic E1550HT
View Four OXYPROP6 (T-OXYD)Oxydation Eric ImbernonJean Christophe MarrotCentrothermCentronic E1550HT
View Four RECUIT6 (T-RRD)Recuits / AnnealingEric ImbernonJean Christophe MarrotCentrothermCentronic E1550HT
View Four SI3N46 (T-LPCV)LPCVDEric ImbernonPascal DubreuilCentrothermCentronic E1550HT
View Four SIPOLY6 (T-LPCV)LPCVDEric ImbernonPascal DubreuilCentrothermCentronic E1550HT
View Four Tempress Si-poly (T-LPCV)LPCVDEric ImbernonPascal DubreuilTempressDépot LPCVD
View FTIR (C-MEB)Caractérisation / characterizationBenjamin ReigJean-Baptiste DoucetBRUKERTENSOR 27
View fume hood exploratory chemistry Procédés humides / Wet process benchesJean-Baptiste DoucetTom Gouveiato be precisedto be checked
View GenISys labPhotolithographie / PhotolithographyLaurent MazenqAdrian LabordeGenISys Lab v4.7.0
View Gravure KOH (E-KOH)Procédés humides / Wet process benchesDavid Bourrier MinaservicesKOH
View Gravure TMAH (E-TMAH)Procédés humides / Wet process benchesDavid Bourrier MinaservicesTMAH
View Grinder G&N (A-POLI)Assemblage / Device mountingSamuel CharlotSamuel CharlotGrinderMPS2 R300 D CS
View HMDS ObducatPhotolithographie / PhotolithographyLaurent MazenqAdrian LabordeObducat Solar Semi QS V 200 BM 200°C
View HMP 90 (L-DLW)Lithographie laser / Laser lithographyPierre-François CalmonDavid ColinSUSSHMP 90
View Hotte implanteurOther processesEric ImbernonJean Christophe MarrotMinaserviceHotte
View Hotte Litho laserLithographie laser / Laser lithographyPierre-François CalmonDavid ColinDV TechPaillasse
View hotte montageAssemblage / Device mountingSamuel CharlotSamuel Charlotunknouwnunknouwn
View Hotte nanoNano imprintFranck CarcenacJean-Baptiste DoucetDVTEchHotte nano
View Hotte polissageAssemblage / Device mountingSamuel CharlotSamuel Charlotunknouwnunknouwn
View hotte solvantsIntegration/ Device mountingSamuel CharlotSamuel CharlotMina servicesinox
View Hotte Wafer BonderIntegration/ Device mountingSamuel CharlotSamuel CharlotDevetekno model
View HRP2-N14Robots humanoïdesOlivier STASSE KawadaHRP2
View ICP2 III-V et NoMos (G-TRIK)Gravure plasma / Plasma etchingAurélie LECESTRElaurent bouscayrolTrikon (SPTS)Omega 201 (1996)
View ICP3 NoMos (G-TRIK)Gravure plasma / Plasma etchingAurélie LECESTRElaurent bouscayrolTrikon (SPTS)Omega 201 (1994)
View ICPECVD (T-PECV)PECVDJean Christophe MarrotPascal DubreuilOxfordPlasmalab 100 - HDPECVD
View Implanteur ionique IMC 200 (I-IMPL)ImplantationEric ImbernonJean Christophe MarrotEatonNV 4206
View Jauge de mesure d'épaisseurAssemblage / Device mountingSamuel CharlotSamuel CharlotLogitechSYLVAC CH-1023 Crissier
View MA6 Gen4 (P-MANU)Photolithographie / PhotolithographyLaurent MazenqAdrian LabordeSuss MicrotecMABA6Gen4
View MBE2300 (M-2300)Epitaxie / EpitaxyAlexandre Arnoultquentin gravelierRIBER SAMBE2300
View MBE32P (M32)Epitaxie / EpitaxyAlexandre Arnoultquentin gravelierRIBER SAMBE32P
View MBE412 (M412)Epitaxie / EpitaxyAlexandre Arnoultquentin gravelierRIBER SAMBE412
View MEB S-3700N (C-MEB)Caractérisation / characterizationBenjamin ReigFranck CarcenacHITACHIS-3700N
View MEB S-4800 (C-MEB)Caractérisation / characterizationBenjamin ReigFranck CarcenacHITACHIS-4800
View Mesure planéitéAssemblage / Device mountingSamuel CharlotSamuel CharlotLogitechGI20
View Micro InjecteurAssemblage / Device mountingSamuel CharlotSamuel CharlotNarishigeIM 300
View microscope LeicaIntegration/ Device mountingSamuel CharlotSamuel CharlotLeicaEZ4D
View microscope leica photo autoPhotolithographie / PhotolithographyLaurent MazenqAdrian LabordeLeicaDM4000M
View microscope leica photo manuelPhotolithographie / PhotolithographyLaurent MazenqAdrian LabordeLeicaDM-4000M
View Microscope optique LeicaCaractérisation / characterizationBenjamin ReigAvatar BenjaminLEICADM4000
View Micro-soudeuse Delvotec 5430 (A-SOUD)Assemblage / Device mountingSamuel CharlotSamuel CharlotDelvotec5430
View Micro-soudeuse KnS 4526 (A-SOUD)Assemblage / Device mountingSamuel CharlotSamuel CharlotKulicke and Soffa4526
View Micro-soudeuse KnS 4700 (A-SOUD)Assemblage / Device mountingSamuel CharlotSamuel CharlotKulicke and Soffa4700
View Micro-soudeuse KnS 484 (A-SOUD)Assemblage / Device mountingSamuel CharlotSamuel CharlotKulicke and Soffa484
View Micro-soudeuse KnS 484 (A-SOUD)Assemblage / Device mountingSamuel CharlotSamuel CharlotKulicke and Soffa484
View Micro-soudeuse TPT HB-16 (A-SOUD)Assemblage / Device mountingSamuel CharlotSamuel CharlotTPTHB-16
View Nano-imprint equipment (N-NEXT)Nano imprintJean-Baptiste DoucetEmmanuelle DaranNanonexNX2500
View Nettoyage wafers UH-117Assemblage / Device mountingSamuel CharlotSamuel CharlotUltron Systems, Inc.UH-117
View Olympus MX50Caractérisation / characterizationAurélie LECESTRElaurent bouscayrolOlympusMX50
View optical microscope NIKONCaractérisation / characterizationJean-Baptiste DoucetTom GouveiaNIKONto be checked
View oscilloscopeAssemblage / Device mountingSamuel CharlotSamuel CharlotTektronixTDS-2012
View Paillasse Chime EJM - Solvants - III/VEpitaxie / Epitaxyquentin gravelierAlexandre ArnoultLAASPaillasse PVC LAAS
View Paillasse Chime EJM- Acides - III/VEpitaxie / Epitaxyquentin gravelierAlexandre ArnoultLAASPaillasse PVC LAAS
View Paillasse Chime EJM-1Epitaxie / Epitaxyquentin gravelierAlexandre ArnoultLAASPaillasse PVC LAAS
View Paillasse de Développement & StrippingProcédés humides / Wet process benchesDavid Bourrier LAASDeveloppement
View Paillasse de Développement & UltrasonProcédés humides / Wet process benchesDavid Bourrier MinaservicesUltrasons
View Paillasse dépôts Alternatifs Electrochimie/electroplatingDavid Bourrier LAASn°1
View paillasse electroless (E-Manu)Procédés humides / Wet process benchesVéronique Conédérafabien mesnilgrenteCoillardpaillasse pvc
View paillasse jet d'encreProcédés humides / Wet process benchesfabien mesnilgrenteVéronique ConédéraCoillardpaillasse pvc
View paillasse photo 1 : poste de développementPhotolithographie / PhotolithographyLaurent MazenqAdrian LabordeMinaserviceNC
View paillasse photo 1 : tournette 1 (P-TOUR)Photolithographie / PhotolithographyLaurent MazenqAdrian LabordeSuss MicrotecLabSpin6 BM
View paillasse photo 2 (procédés spécifiques) : poste de développementPhotolithographie / PhotolithographyLaurent MazenqAdrian LabordeMinaserviceNC
View paillasse photo 2 (procédés spécifiques) : tournette 2 (P-TOUR)Photolithographie / PhotolithographyLaurent MazenqAdrian LabordeSuss MicrotecRC8
View paillasse photo 3 (procédés MOS) : poste de développementPhotolithographie / PhotolithographyLaurent MazenqAdrian LabordeMinaserviceNC
View paillasse photo 3 (procédés MOS) : tournette 3 (P-TOUR)Photolithographie / PhotolithographyLaurent MazenqAdrian LabordeSuss MicrotecRC8
View Parylene C30S (D-EVAP)PVDGuillaume LibaudeAdrian LabordeComelecC30S
View PECS (D-EVAP)PVDBenjamin ReigFranck CarcenacGATANPECS
View PECVD 100 ApSy (T-PECV)PECVDPascal DubreuilJean Christophe MarrotApSyMultiplex CVD
View PHOTONIC PROFESSIONAL (L-NANO)Lithographie laser / Laser lithographyPierre-François CalmonDavid ColinNANOSCRIBEPHOTONIC PROFESSIONAL
View plaque chauffante 300°CIntegration/ Device mountingSamuel CharlotDavid BourrierSawatecHP-401-Z
View plaque chauffante SU8 n°1Photolithographie / PhotolithographyLaurent MazenqAdrian LabordeSuss MicrotecHP
View plaque chauffante SU8 n°2Photolithographie / PhotolithographyLaurent MazenqAdrian LabordeSuss MicrotecHP
View Plassys nano (D-EVAP)PVDLudovic SalvagnacGuillaume LibaudePlassysNano
View Plassys Organiques (D-EVAP)PVDLudovic SalvagnacGuillaume LibaudePlassysMEB550B
View PolarographieElectrochimie/electroplatingDavid Bourrier Metrhom797 VA Computrace
View polisseuse CDP41 (A-POLI)Assemblage / Device mountingSamuel CharlotSamuel CharlotLogitechCDP41
View polisseuse ESCIL (A-POLI)Assemblage / Device mountingSamuel CharlotSamuel CharlotEscil ESC200
View Polisseuse PM5 (A-POLI)Assemblage / Device mountingSamuel CharlotSamuel CharlotLogitechPM5
View Profilomètre mécanique Tencor P16+Caractérisation / characterizationBenjamin Reigfabien mesnilgrenteKLA TencorTencor P16+
View Profilomètre mécanique Tencor P17Caractérisation / characterizationBenjamin Reigfabien mesnilgrenteKLA TencorTencor P17
View Profilomètre optique LEXTCaractérisation / characterizationBenjamin Reigfabien mesnilgrenteOlympusOLS LEXT 3100
View Profilomètre optique WykoCaractérisation / characterizationBenjamin Reig VEECOWYKO 3300
View Pull shear testeur (A-SOUD)Assemblage / Device mountingSamuel CharlotSamuel CharlotXyzteccondor sygma
View PyreneRobots humanoïdesOlivier STASSE PAL-RoboticsTALOS
View RAITH150 (N-RAIT)Lithographie électronique / Ebeam lithographyFranck CarcenacAurélie LECESTRERAITHRAITH150 Version1
View RCA/Piranha cleaning MOS Procédés humides / Wet process benchesJean-Baptiste DoucetTom GouveiaVACOto be checked
View Recuit Au et Cu sur Si (T-RRD)Recuits / AnnealingEric ImbernonJean Christophe MarrotASMFour horizontal LB 35
View Recuit ferrite 6" (T-RRD)Recuits / AnnealingJean Christophe MarrotEric ImbernonAETBati de recuit 2 tubes MT/HT
View Recuit métaux divers (sauf Au et Cu) sur Si (T-RRD)Recuits / AnnealingEric ImbernonJean Christophe MarrotASMFour horizontal LB 35
View Recuit métaux lourds 6" (T-RRD)Recuits / AnnealingJean Christophe MarrotEric ImbernonAETBati de recuit 2 tubes MT
View Recuit métaux sur substrats verre (T-RRD)Recuits / AnnealingEric ImbernonJean Christophe MarrotASMFour horizontal LB 35
View Recuit Polyimide (T-RRD)Recuits / AnnealingJean Christophe MarrotEric ImbernonAETBati de recuit 2 tubes MT
View Recuit verre 6" (T-RRD)Recuits / AnnealingJean Christophe MarrotEric ImbernonAETBati de recuit 2 tubes MT/HT
View Rena Cuivre 4 pouces (E-AUTO)Electrochimie/electroplatingDavid Bourrier RENAEPM 100 F
View Rena Cuivre 4 pouces Verticale (E-AUTO)Electrochimie/electroplatingDavid Bourrier RENAEPM 100 F
View Rena Nickel 4 pouces (E-AUTO)Electrochimie/electroplatingDavid Bourrier RENAEPM 100 F
View Rena Or 4 pouces (E-AUTO)Electrochimie/electroplatingDavid Bourrier RENAEPM 100 F
View Report Eutectique (A-SOUD)Assemblage / Device mountingSamuel CharlotSamuel CharlotSETsc910
View Report eutectique KnS 6482(A-SOUD)Assemblage / Device mountingSamuel CharlotSamuel CharlotKulicke and Soffa6482
View Report flip chip (A-FLIP)Integration/ Device mountingSamuel CharlotSamuel CharlotSETFC150
View Report/Collage Tresky T3000 (A-MONT)Assemblage / Device mountingSamuel CharlotSamuel CharlotDr TreskyT3000
View Report/Collage Tresky T4907 (A-MONT)Assemblage / Device mountingSamuel CharlotSamuel CharlotDr TreskyT4907
View réseau air secSupport salle blancheAntoine MaioranoThierry DocontoSOME IndustrieCompair LRS22 10 bars
View Réseau éffluents gazSupport salle blancheEric ImbernonThierry DocontoCentrothermCT-BW
View Résistivimètre automatiqueCaractérisation / characterizationBenjamin ReigEric ImbernonChangmin TechCMT-SR200
View Résistivimètre manuelCaractérisation / characterizationBenjamin ReigEric Imbernonnoa remplir
View Riber degas (D-EVAP)PVDLudovic SalvagnacGuillaume LibaudeRiberDegas
View right organic solvents fume hood with lowerable windowProcédés humides / Wet process benchesJean-Baptiste DoucetTom GouveiaFluidairto be checked
View RomeoRobots humanoïdesOlivier STASSE Softbank roboticsRomeo 3
View RTP As-Master (T-RTP)Recuits / AnnealingJean Christophe MarrotEric ImbernonAnnealsysAS-Master-2000HT
View RTP As-One (T-RTP)Recuits / AnnealingJean Christophe MarrotEric ImbernonAnnealsysAS-ONE
View Scie diamanté DAD-321 (A-COUP)Assemblage / Device mountingSamuel CharlotSamuel CharlotDISCODAD-321
View Scriber JFP-S100Assemblage / Device mountingSamuel CharlotOlivier Gauthier-LafayeCEFORIJFP-S100
View Scriber Karl-SUSS RH-100Assemblage / Device mountingSamuel CharlotSamuel CharlotKarl-SUSSRH-100
View Scriber SETAssemblage / Device mountingSamuel CharlotSamuel CharlotSETA3
View sérigraphie (A-SERI)Integration/ Device mountingSamuel CharlotSamuel CharlotDEK01i
View SFD (J-CO2)Traitement de surface / Surface treatmentfabien mesnilgrenteRémi Courson31 degreesSFD 200
View Shipley 3024 (A-LAMI)Integration/ Device mountingSamuel CharlotSamuel CharlotShipley3024
View Shipley 360 (A-LAMI)Integration/ Device mountingSamuel Charlot Shipley360
View SI500 (G-TRIK)Gravure plasma / Plasma etchingAurélie LECESTRElaurent bouscayrolSENTECHSI500
View SPD (J-SPD)Traitement de surface / Surface treatmentfabien mesnilgrenteRémi CoursonMEMSSTARSPD
View spectroline 248nmTraitement de surface / Surface treatmentVéronique Conédérafabien mesnilgrentespectrolinePC-2200A
View Spectromètre UV-VIS (C-MEB)Caractérisation / characterizationBenjamin Reig PerkinElmerlambda650
View spin coater for exploratory chemistry (P-TOUR)Other processesJean-Baptiste Doucet suss microtechRC8
View Stepper Canon (P-STEP)Photolithographie / PhotolithographyLaurent MazenqAdrian LabordeCanonFPA 3000i4/i5
View Suss MA150 (P-AUTO)Photolithographie / PhotolithographyAdrian LabordeLaurent MazenqSuss Microtec150 CC
View Suss MA6 (P-MANU)Photolithographie / PhotolithographyAdrian LabordeLaurent MazenqSuss Microtec6
View Suss MJB3 GaAs (P-MANU)Photolithographie / PhotolithographyLaurent MazenqAdrian LabordeSuss MicrotecMJB3
View Suss MJB3 Si (P-MANU)Photolithographie / PhotolithographyLaurent MazenqAdrian LabordeSuss MicrotecMJB3
View Suss SprayCoater (P-SPRA)Photolithographie / PhotolithographyLaurent MazenqAdrian LabordeSuss MicrotecAltaspray
View TEPLA plasma O2 (G-PLAS)Gravure plasma / Plasma etchingAurélie LECESTRElaurent bouscayrolTEPLA300 semi-auto
View Test toolCaractérisation / characterizationHugues Granier TestbolagetA
View Test Tool 2Assemblage / Device mountingMartin (Admin) Klarqvist Intiro Development ABOne tool to rule them all
View Test Tool 3Other processesMartin (Admin) Klarqvist Intiro Development ABOne tool to rule them all 2
View Testeur sous pointesCaractérisation / characterizationBenjamin ReigEric ImbernonSETTR5230
View TFE 644 Pulvérisation (D-SPUT)PVDLudovic SalvagnacGuillaume LibaudeThin FIlm Equipment (TFE)644
View Titration Electrochimie/electroplatingDavid Bourrier MetrhomTitrando
View Tousimis (J-CO2)Other processesfabien mesnilgrenteVéronique ConédéraTousimis915B
View Univex 450 Pulvérisation (D-SPUT)PVDLudovic SalvagnacGuillaume LibaudeOerlikonUnivex 450C
View UV OzoneTraitement de surface / Surface treatmentfabien mesnilgrenteVéronique ConédéraJelight42
View UV -ozone Traitement de surface / Surface treatmentJean-Baptiste DoucetTom GouveiaJelight42-220
View Wafer bonder AML (A-WAFB)Integration/ Device mountingSamuel CharlotSamuel CharlotAMLWB4
View Wafer bonder SUSS (A-WAFB)Integration/ Device mountingSamuel CharlotSamuel CharlotSUSSSB6e
View Wafer Substrate BondingAssemblage / Device mountingSamuel CharlotSamuel CharlotLogitechWSB1
View Varian Evaporation (D-EVAP)PVDLudovic SalvagnacGuillaume LibaudeMTB SolutionsVarian 3616
View wet batch photoresist stripping by AZ100 removerProcédés humides / Wet process benchesJean-Baptiste DoucetTom GouveiaVACOto be checked
View wet bench III-VProcédés humides / Wet process benchesJean-Baptiste DoucetTom GouveiaCoillardto be checked
View wet bench metal etchingProcédés humides / Wet process benchesJean-Baptiste DoucetTom GouveiaVACOwet bench
View wet bench organic solvents PDMS and outgasingProcédés humides / Wet process benchesJean-Baptiste DoucetTom GouveiaPTSHotte
View viscosimètreCaractérisation / characterizationfabien mesnilgrenteVéronique Conédéraanton paarAMVn
View viscosimètreIntegration/ Device mountingSamuel CharlotSamuel CharlotFungilabsmart
View Yamamoto 4'' (E-MANU)Electrochimie/electroplatingDavid Bourrier YamamotoSmart Cell 4 ''
View Yamamoto Cuivre 4/6" (E-MANU)Electrochimie/electroplatingDavid Bourrier LAASPlating Set 4'' and 6 ''
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