Picture of ApSy E100 NoMOS (D-PRST)
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Evaporation thermique : il consiste à chauffer par effet joule un matériau qui, vaporisé, va se déposer sur un substrat.

 

Thermal evaporation: it consists in heating by Joule effect a material which, vaporized, will be deposited on a substrate.

Tool name:
ApSy E100 NoMOS (D-PRST)
Area/room:
PVD (Bât F)
Category:
PVD
Manufacturer:
Application Systemes
Model:
E100

Il y a la possibilté de créer une ou plusieurs couches.

Les métaux utilisés dans ce bâti sont :

  • Ti, Au, Cu, Ag, AuGe, NiCr, MoO2... (autres matériaux sur demande)

 

There is the possibility of creating one or more layers.

Metals used in this system are:

  • Ti, Au, Cu, Ag, AuGe, NiCr, MoO2... (other materials on request)

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