Picture of Paillasse Chime EJM- Acides - III/V
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Clean bench -  Acids III/V

Cleaning bench for Acids attacks on III/V componante only.

This bench is devoted to the use acids on III/V wafers, before epitaxy when no particles are involved or generated by the process. As a consequence no particles generating processes (such as lift-offs, or OTS surface treatments) is allowed on this bench.

Paillasse - Solvants III / V

 


Paillasse pour utilisation d'acides sur composant III / V uniquement.

Ce banc est consacré à la réalisation d'attaques acides sur substrats III / V, avant épitaxie, lorsque aucune particule n’est impliquée ou générée par le processus. En conséquence, aucun processus pouvant générer des particules (tels que le lift off ou les traitements de surface OTS) n'est autorisé sur ce banc.

 

 

Tool name:
Paillasse Chime EJM- Acides - III/V
Area/room:
EJM/MBE (Bât G2)
Category:
Epitaxie / Epitaxy
Manufacturer:
LAAS
Model:
Paillasse PVC LAAS
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

Chimie acide

Acid chemistry

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