Picture of SPD  (J-SPD)
Current status:
AVAILABLE
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Equipement de traitement de surface par greffage de SAM (Self Assembled Monolayer) en phase gazeuse.

Traitement de surface de matériaux à base de Silicium ou polymères.

English

Surface treatment tool by SAM (Self Assembled Monolayer) grafting in gazeous phase.

Silicon based or polymer material can be treated.

Tool name:
SPD (J-SPD)
Area/room:
Traitements thermiques/thermal treament (Bâts F et
Category:
Traitement de surface / Surface treatment
Manufacturer:
MEMSSTAR
Model:
SPD
Max booking time, day:
180 hours
Max booking time, night:
180 hours
No. of future bookings:

FDTS 5min (plasma O2 45s) pour matériaux à base Si

FDTS 5min (SiO2 5min) pour polymères

English

FDTS 5min (plasma O2 45s) for Si based materials

FDTS 5min (SiO2 5min) for polymers

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