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Riber degas NoMOS (D-PRST) (D7)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Ludovic Salvagnac
2nd Responsible:
Guillaume Libaude
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Description
Etude de dégazage sous vide.
Vacuum degasing study.
Details
Tool name:
Riber degas NoMOS (D-PRST)
Area/room:
PVD (Bât F)
Category:
PVD
Manufacturer:
Riber
Model:
Degas
Validated processes informations
Specifications:
Temperature range: 20 – 250°C
Accuracy of temperature: +/-1°C per 100°C
Substrate loading: manual
Max. substrate size: 1×4"
Max. substrate thickness: 4mm
Spectrometer range : 1 to 300 amu
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