Picture of RTP As-Master (T-RTP)
Current status:
AVAILABLE
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Four de recuit rapide 4"/6"/8" pour substrats Si. Température max: 1400°C.

Rapid thermal annealing furnace for Si substrate 4"/6"/8". Max temp.: 1400°C

Tool name:
RTP As-Master (T-RTP)
Area/room:
Traitements thermiques/thermal treament (B√Ęts F et
Category:
Recuits / Annealing
Manufacturer:
Annealsys
Model:
AS-Master-2000HT
Max booking time, day:
8 hours
Max booking time, night:
8 hours
No. of future bookings:

Température de recuit variant de 200°C à 1400°C sous N2, N2/H2 ou O2. Temps de montée maximum: 45°C/s.

Annealing temperature between 200°C and 1400°C under N2/H2 and O2. Maximum temperature rate: 45°C/s

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