Picture of Parylene C30S (D-EVAP)
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Le parylène est un film polymère biocompatible qui se dépose sous vide après évaporation et transformation de son précurseur. Les propriétés de conformité et d'uniformité, d'isolation électrique et de barrière chimique, découlant de sa structure et de son procédé de mise en œuvre sont présentées. Ses propriétés optiques et de surface sont aussi exposées ainsi que les différents types de parylène.

 

Parylene is a biocompatible polymer film which is deposited under vacuum after evaporation and transformation of his precursor. Conformity and uniformity, electrical isolation and chemical barrier properties resulting from his structure and method of implementation are presented. Optical and surface properties are also exposed as well as the different types of parylene.

Tool name:
Parylene C30S (D-EVAP)
Area/room:
Integration/Assemblage (Bât G1/G)
Category:
PVD
Manufacturer:
Comelec
Model:
C30S
Max booking time, day:
10 hours
Max booking time, night:
10 hours
No. of future bookings:

Specifications:

  • Temperature range: 20 – 450°C
  • Pressure range : 40-50 µBar
  • Accuracy of temperature: +/-1°C per 100°C
  • Substrate loading: manual
  • Max. substrate size: 8"
  • Using of Cryogenic Azote

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