Picture of MEB S-4800 (C- MEB)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Benjamin Reig
2nd Responsible:
Franck Carcenac
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Description

Le MEB S-4800 est un microscope électronique à balayage haute résolution (FEG à cathode froide) pour l'analyse des composants lors des process de fabrication.

---English---

The SEM S-4800 is an high resolution Scanning Electron Microscope (cold FEG) for the analysis of component during the production step.

Details
Tool name:
MEB S-4800 (C- MEB)
Area/room:
Caractérisation / Characterization (bat G1)
Category:
Caractérisation / characterization
Manufacturer:
HITACHI
Model:
S-4800
Validated processes informations

Les tension d'accélération permise vont de 500V à 30kV avec des courants de 1 à 20µA.

Il dispose de 5 détecteurs (2 SE, 1BSE, 1 STEM, 1 EDX) pour permettre une analyse complète d'un élément.

Il est possible d'observer des échantillons allant jusqu'a 6".

---English---

It is possible to  tune the acceleration voltage from 500 Volts to 30kV with 1 to 20µA current. The maximal resolution is around few nanometer and we can switch with different detectors (2 SE, 1 BSE, 1STEM and 1 EDS) for a complete analysis of your sample. 

It is possible to image from millimeter to 6" sample.

Instructors & Licensed Users

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Tool Modes
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