Picture of Recuit métaux divers (sauf Au et Cu) sur Si  (T-RRD)
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Four de recuits métaux divers 4" et 6" excepté Au et Cu sur Si.

Annealing metals furnace excepted Au and Cu on 4" and 6" Si wafers.

Tool name:
Recuit métaux divers (sauf Au et Cu) sur Si (T-RRD)
Area/room:
Traitements thermiques/thermal treament (Bâts F et
Category:
Recuits / Annealing
Manufacturer:
ASM
Model:
Four horizontal LB 35
Max booking time, day:
8 hours
Max booking time, night:
hours
No. of future bookings:

Tempéraure de 100°C à 500°C sous N2 et N2/H2.

Temperature between 100°C up to 500°C under N2 and N2/H2.

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