Picture of MOSNano wet bench (F-FRAI)
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Wet bench for nanoMOS technology.

This wet bench is designed to handle Metallic contaminations sensitive nanosamples i.e. nanoMOS technology.  MOS technology detrimental metals like gold or copper are not allowed in this wet bench, neither are sodium or potassium salts. Particles generating processes such as lift off are not allowed to.

The bench can be used etiher with organic solvents or acids but not at the same time, especially when dealing with strongly incompatible chemicals such as H2O2/H2SO4 mixture and acetone

Tool name:
MOSNano wet bench (F-FRAI)
Area/room:
Photolithographies (Bât F)
Category:
Procédés humides / Wet process benches
Manufacturer:
PTS-DVTECH
Model:
sorbonne

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