Picture of Varian Evaporation (D-EVAP)
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Evaporation thermique : il consiste à chauffer par canon à éléctrons un matériau qui, vaporisé, va se déposer sur un substrat.

 

Thermal evaporation: it consists in heating by electron gun a material which, vaporized, will be deposited on a substrate.

Tool name:
Varian Evaporation (D-EVAP)
Area/room:
PVD (Bât F)
Category:
PVD
Manufacturer:
MTB Solutions
Model:
Varian 3616
Max booking time, day:
10 hours
Max booking time, night:
10 hours
No. of future bookings:

Il y a la possibilté de créer une ou plusieurs couches.

Les métaux utilisés dans ce bâti sont :

  • Ti, Au, Pt, Cr et Cu

 

There is the possibility of creating one or more layers.

Metals used in this system are:

  • Ti, Au, Pt, Cr and Cu

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