Picture of HMDS Primer Obducat MOS and NoMOS (F-FRAI)
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Obducat automatic HMDS treatment system used at LAAS-CNRS since 2018.

 

 

Tool name:
HMDS Primer Obducat MOS and NoMOS (F-FRAI)
Area/room:
Photolithographies (Bât F)
Category:
Photolithographie / Photolithography
Manufacturer:
Obducat Solar Semi
Model:
QS V 200 BM 200°C

Allow contact angle beetween 45-65°.

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