Picture of HMDS Obducat
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AVAILABLE
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Obducat automatic HMDS treatment system used at LAAS-CNRS since 2018.

Allow contact angle beetween 45-65°.

 

Système de traitement automatique HMDS Obducat installé au LAAS-CNRS depuus 2018.

Permet des angles de contact entre 45° et 65°

Tool name:
HMDS Obducat
Area/room:
Photolithographies (Bât F)
Category:
Photolithographie / Photolithography
Manufacturer:
Obducat Solar Semi
Model:
QS V 200 BM 200°C
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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