Picture of EVA 600 Evaporation NoMOS (D-PRST)
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Evaporation thermique : il consiste à chauffer par canon à éléctrons un matériau qui, vaporisé, va se déposer sur un substrat.


Thermal evaporation: it consists in heating by electron gun a material which, vaporized, will be deposited on a substrate.


Tool name:
EVA 600 Evaporation NoMOS (D-PRST)
PVD (Bât F)
Alliance Concept
EVA 600

Il y a la possibilté de créer une ou plusieurs couches.

Les métaux utilisés dans ce bâti sont :

  • Ti,Ta, Au, Cu, Pd, Al, Pt, Cr, Ni, Co

There is the possibility of creating one or more layers.

Metals used in this system are:

  • Ti, Ta, Au, Cu, Pd, Al, Pt, Cr, Ni, Co


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