Picture of DILASE 750  (L-DILA)
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Système d'insolation lasers UV pour le prototypage de composants

UV laser insolation system for prototyping components

https://www.kloe-france.com/fr/photolithographie-laser-uv/systemes-photolithographie/ecriture-directe-laser/dilase-750

Tool name:
DILASE 750 (L-DILA)
Area/room:
Lithographie laser : Laser Lithography (Bât G1)
Category:
Lithographie laser / Laser lithography
Manufacturer:
KLOE
Model:
DILASE 750
Max booking time, day:
48 hours
Max booking time, night:
48 hours
No. of future bookings:

Ecriture directe sur échantillons de tailles comprises entre 2 et 150 mm

Insolation de résines positives (AZ, ECI, SPR,...), de résines négatives (SU8, BPN, Nlof, KCL,...), de films secs (DF, WBR,...) et polymides photosensibles

Direct writing on samples with sizes between 2 and 150 mm

Insolation of positive photoresists (AZ, ECI, SPR,...), negative photoresists (SU8, BPN, Nlof, KCL,...),dry sensitive films (DF, WBR,...) and polymide resins

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