Picture of DILASE 750  (L-DILA)
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Système d'insolation lasers UV et de traitements de surface

UV laser insolation system and surface treatments

Tool name:
DILASE 750 (L-DILA)
Area/room:
Lithographie laser : Laser Lithography (Bât G1)
Category:
Lithographie laser / Laser lithography
Manufacturer:
KLOE
Model:
DILASE 750
Max booking time, day:
48 hours
Max booking time, night:
48 hours
No. of future bookings:

Ecriture directe sur échantillons de tailles comprises entre 2 et 150 mm

Insolation de résines positives (AZ, ECI, SPR,...), de résines négatives (SU8, BPN, Nlof, KCL,...), de films secs et polymides photosensibles

Traitement de surface du matériau PET

Direct writing on samples with sizes between 2 and 150 mm

Insolation of positive photoresists (AZ, ECI, SPR,...), negative photoresists (SU8, BPN, Nlof, KCL,...),dry sensitive films and polymide resins

Surface treatment of PET material

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