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Recuits Au et Cu 4" et 6" sur substrats silicium.

Au and Cu annealing furnace for 4 and 6 inches silicon wafers

Tool name:
Recuit Au et Cu sur Si (T-RRD)
Area/room:
Traitements thermiques/thermal treament (B√Ęts F et
Category:
Recuits / Annealing
Manufacturer:
ASM
Model:
Four horizontal LB 35
Max booking time, day:
8 hours
Max booking time, night:
hours
No. of future bookings:

Tempéraure de 100°C à 400°C sous N2, O2 et N2/H2.

Temperature between 100°C up to 400°C under N2, O2 and N2/H2.

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