Picture of RTP As-One (T-RTP)
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AVAILABLE
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Four de recuit rapide échantillons/4"/6" pour substrats AsGa et Si. Température max: 1100°C.

Rapid thermal annling furnace for samples/4"/6" for Si and GaAs substrates. Max temp: 1100°C.
 

Tool name:
RTP As-One (T-RTP)
Area/room:
Traitements thermiques/thermal treament (B√Ęts F et
Category:
Recuits / Annealing
Manufacturer:
Annealsys
Model:
AS-ONE
Max booking time, day:
8 hours
Max booking time, night:
8 hours
No. of future bookings:

Température de recuit variant de 200°C à 1100°C sous N2 ou N2/H2. Temps de montée maximum: 45°C/s.

Annealing temperature between 100°C and 1100°C under N2/H2 and O2. Maximum temperature rate: 45°C/s

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