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AVAILABLE
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Procédés chimiques pour la fabrication des masques optiques

Chemical wet processes for optical masks making

Tool name:
Hotte Litho laser
Area/room:
Lithographie laser : Laser Lithography (Bât G1)
Category:
Lithographie laser / Laser lithography
Manufacturer:
DV Tech
Model:
Paillasse
Max booking time, day:
20 hours
Max booking time, night:
20 hours
No. of future bookings:

Fabrication de masques de tailles 2.5, 4, 5 et 7 pouces.

Fabrication de réticules de taille 6 pouces.

Fabricate masks sizes 2.5", 4", 5" and 7".

Fabricate reticles sizes 6"

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