Picture of SFD (J-CO2)
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Equipement de traitement de surface en milieu CO2 supercritique.

Capacité jusqu'à 2 substrats 200mm.

2 lignes d'injection de précurseurs (nombreuses molécules compatibles).

Pression jusqu'à 140 bar.

English

Surface treatment tool in supercritical CO2 phase.

Up to 2 8" wafers.

2  precursor lines (numerous molecules compatible).

Pressure up to 140 bar.

Tool name:
SFD (J-CO2)
Area/room:
PVD (Bât F)
Category:
Traitement de surface / Surface treatment
Manufacturer:
31 degrees
Model:
SFD 200
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

La diffusion du CO2 supercritique est intermédiaire entre le milieu gazeux et le milieu liquide.

Possibilité d''ajout de co-solvant.

English

Supercritical CO2 diffusion is intermediary between gazeous and liquid phases.

Possibility to add a co-solvant.

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