Picture of étuve polymères
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AVAILABLE
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Binder oven used at LAAS-CNRS since 2002.

Allow programmable baking process on samples, 4" and 6" wafers.

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Etuve Binder utilisée au LAAS-CNRS depuis 2002

Permet la programmation de procédés de recuit sur wafers 4 et 6 pouces

Tool name:
étuve polymères
Area/room:
Photolithographies (Bât F)
Category:
Photolithographie / Photolithography
Manufacturer:
Memmert
Model:
XXXX
Max booking time, day:
12 hours
Max booking time, night:
12 hours
No. of future bookings:

Temperature max : 200°C

 

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