Picture of Suss SprayCoater (P-SPRA)
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AVAILABLE
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Suss Microtec automatic spraycoating system used at LAAS-CNRS since 2010.

Allow photoresist coating on samples, 4" and 6" wafers.

 

Equipement Suss Microtec de dépôt de résines par spray. en fonctionnement au LAAS-CNRS depuis 2010.

Dépôts de résines sur échantillons, substrats 4' et 6''.

Tool name:
Suss SprayCoater (P-SPRA)
Area/room:
Photolithographies (Bât F)
Category:
Photolithographie / Photolithography
Manufacturer:
Suss Microtec
Model:
Altaspray
Max booking time, day:
4 hours
Max booking time, night:
12 hours
No. of future bookings:

Photoresists available: AZ4999 (7µm and 35µm thickness), NLOF (7µm, 15µm), SU8 3050 (10µm)

 

Résines disponibles : AZ4999 (7µm and 35µm), NLOF (7µm, 15µm), SU8 3050 (10µm)

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