Picture of SprayCoater Suss Microtec NoMOS (P-PHOT)
Current status:
WARNING
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Responsibles
1st Responsible:
Laurent Mazenq
2nd Responsible:
Adrian Laborde
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Description

Suss Microtec automatic spraycoating system used at LAAS-CNRS since 2010.

Allow photoresist coating on samples, 4" and 6" wafers.

 

Equipement Suss Microtec de dépôt de résines par spray. en fonctionnement au LAAS-CNRS depuis 2010.

Dépôts de résines sur échantillons, substrats 4' et 6''.

Details
Tool name:
SprayCoater Suss Microtec NoMOS (P-PHOT)
Area/room:
Photolithographies (Bât F)
Category:
Photolithographie / Photolithography
Manufacturer:
Suss Microtec
Model:
Altaspray
Validated processes informations

Photoresists available: AZ4999 (7µm and 35µm thickness), NLOF (7µm, 15µm), SU8 3050 (10µm)

 

Résines disponibles : AZ4999 (7µm and 35µm), NLOF (7µm, 15µm), SU8 3050 (10µm)

Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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