Manual coating and development workstation.

Allow manual coating, bake and development of photoresist on samples, 4" and 6" wafers.

Specifications:

- 1 coating station (Suss microtec RC8 for samples to 6'' wafers)

- 1 development station (puddle)

- 1 SU8 programmable hotplate (Suss Microtec)

- 2 hotplates

Postes de travail de photolithographie

Specifications:

- 1 tournette (Suss Microtec RC8 pour substrats 10mm à 150mm)

- 1 plaque chauffante SU8 avec rampes en température

- 1 station de développement manuel (bécher)

 - 2 plaques chauffantes