Picture of HMDS Primer oven MOS (F-FRAI)
Current status:
DOWN
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Responsibles
1st Responsible:
Laurent Mazenq
2nd Responsible:
Adrian Laborde
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Description

Yes automatic HMDS treatment system used at LAAS-CNRS since 2005.

 

Details
Tool name:
HMDS Primer oven MOS (F-FRAI)
Area/room:
Photolithographies (Bât F)
Category:
Photolithographie / Photolithography
Manufacturer:
Yes
Model:
Yes
Validated processes informations

Allow contact angle beetween 45-65°.

Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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