Picture of Si 500 ALE
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Aurélie LECESTRE
2nd Responsible:
Mathieu ARRIBAT
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Description
Details
Tool name:
Si 500 ALE
Area/room:
Gravure plasma/plasma etching (Bât F)
Category:
Gravure plasma / Plasma etching
Manufacturer:
Sentech
Model:
500 683
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Tool Modes
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