LIMS - [View Tool]

No access? Apply for access here...

Username:

Password:

ECR PECVD NoMOS (T- CVD) (CVD3)

Current status:

DOWN

Book | Log|

Show/Collapse all

Responsibles

1st Responsible:

Pascal Dubreuil

2nd Responsible:

Files

You must be logged in to view files.

Description

This equipment is not available

Details

Tool name:

ECR PECVD NoMOS (T- CVD)

Area/room:

Traitements thermiques/thermal treament (Bâts F et

Category:

PECVD

Manufacturer:

Roth&Rau

Model:

AK400

Tool Modes

You must be logged in to view tool modes.