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ECR PECVD NoMOS (T- CVD) (CVD3)
Current status:
DOWN
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Responsibles
1st Responsible:
Pascal Dubreuil
2nd Responsible:
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Description
This equipment is not available
Details
Tool name:
ECR PECVD NoMOS (T- CVD)
Area/room:
Traitements thermiques/thermal treament (Bâts F et
Category:
PECVD
Manufacturer:
Roth&Rau
Model:
AK400
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