Picture of HMX NoMOS (L- DWL)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Pierre-François Calmon
2nd Responsible:
David Colin
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Description

Système de traitements chimiques par spray

Chemical wet processes with spray

Details
Tool name:
HMX NoMOS (L- DWL)
Area/room:
Lithographie laser : Laser Lithography (Bât G1)
Category:
Lithographie laser / Laser lithography
Manufacturer:
SUSS
Model:
HMX
Validated processes informations

Traitements pour des masques de tailles 4, 5 et 7 pouces

Traitements pour des réticules 6 pouces

Processes for masks sizes 4, 5 and 7 inches

Processes for reticles 6 inches

Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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