Picture of Four OXYPROP6 MOS Compatible (T-FOUR)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Eric Imbernon
2nd Responsible:
Jean Christophe Marrot
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Description

Four d'oxydation 4 et 6 pouces pour plaquettes Si vierges

Oxidation furnace for 4 and 6 inches silicon wafers

Details
Tool name:
Four OXYPROP6 MOS Compatible (T-FOUR)
Area/room:
Traitements thermiques/thermal treament (Bâts F et
Category:
Oxydation
Manufacturer:
Centrotherm
Model:
Centronic E1550HT
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