Picture of DILASE 3D MR NoMOS (L-  3D)
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Système d'insolation laser 3D avec 2 tailles de faisceau focalisé (5 et 20 µm)

3D laser insolation system with 2 sizes of focalised beam (5 and 20 µm)

https://www.kloe-france.com/fr/photolithographie-laser-uv/systemes-photolithographie/ecriture-directe-laser/impression-3D

Tool name:
DILASE 3D MR NoMOS (L- 3D)
Area/room:
Jet d'encre / ink jet (Bât G1)
Category:
Lithographie laser / Laser lithography
Manufacturer:
KLOE
Model:
Dilase 3DMR

Ecriture directe sur échantillons de tailles comprises entre 5 et 50 mm

Fabrication de structures 3D avec des résolutions de 5 µm et 20 µm

Direct writing on samples with sizes between 5 and 50 mm

Fabrication of 3D structures with resolutions of 5 µm and 20 µm

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