Picture of HMDS Primer Obducat MOS and NoMOS (F-FRAI)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Laurent Mazenq
2nd Responsible:
Adrian Laborde
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Description

Obducat automatic HMDS treatment system used at LAAS-CNRS since 2018.

 

 

Details
Tool name:
HMDS Primer Obducat MOS and NoMOS (F-FRAI)
Area/room:
Photolithographies (Bât F)
Category:
Photolithographie / Photolithography
Manufacturer:
Obducat Solar Semi
Model:
QS V 200 BM 200°C
Validated processes informations

Allow contact angle beetween 45-65°.

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Instructors

Licensed Users

Tool Modes
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