Picture of Hotte Litho laser NoMOS (F-FRAI)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Pierre-François Calmon
2nd Responsible:
David Colin
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Description

Procédés chimiques pour la fabrication des masques optiques

Chemical wet processes for optical masks making

Details
Tool name:
Hotte Litho laser NoMOS (F-FRAI)
Area/room:
Lithographie laser : Laser Lithography (Bât G1)
Category:
Lithographie laser / Laser lithography
Manufacturer:
DV Tech
Model:
Paillasse
Validated processes informations

Fabrication de masques de tailles 2.5, 4, 5 et 7 pouces.

Fabrication de réticules de taille 6 pouces.

Fabricate masks sizes 2.5", 4", 5" and 7".

Fabricate reticles sizes 6"

Instructors & Licensed Users

Instructors

Licensed Users

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