Picture of Riber degas NoMOS (D-PRST)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Ludovic Salvagnac
2nd Responsible:
Guillaume Libaude
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Description

Etude de dégazage sous vide.

 

Vacuum degasing study.

Details
Tool name:
Riber degas NoMOS (D-PRST)
Area/room:
PVD (Bât F)
Category:
PVD
Manufacturer:
Riber
Model:
Degas
Validated processes informations

Specifications:

  • Temperature range: 20 – 250°C
  • Accuracy of temperature: +/-1°C per 100°C
  • Substrate loading: manual
  • Max. substrate size: 1×4"
  • Max. substrate thickness: 4mm
  • Spectrometer range : 1 to 300 amu
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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