Picture of Recuit Au et Cu sur tout substrats (T-FOUR)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Eric Imbernon
2nd Responsible:
Jean Christophe Marrot
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Description

Four de recuit métaux 4" et 6" sur substrats verre.

Métals annealing furnace for 4 and 6 inches glass wafers

Details
Tool name:
Recuit Au et Cu sur tout substrats (T-FOUR)
Area/room:
Traitements thermiques/thermal treament (Bâts F et
Category:
Recuits / Annealing
Manufacturer:
ASM
Model:
Four horizontal LB 35
Validated processes informations

Tempéraure de 100°C à 500°C sous N2, O2 et N2/H2.

Temperature between 100°C up to 500°C under N2, O2 and N2/H2.

Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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