Picture of Scrubber éffluents gaz fours
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Eric Imbernon
2nd Responsible:
laurent bouscayrol
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Description

Système de traitement des gaz rejetés par les pompes à vide des fours LPCVD Centrotherm.

Traitement system of gases rejected by the vaccuum pumps of the LPCVD Centrotherm furnaces

Details
Tool name:
Scrubber éffluents gaz fours
Area/room:
RDC technique (Bâts F et G2)
Category:
Support salle blanche
Manufacturer:
Centrotherm
Model:
CT-BW
Validated processes informations

Débit maximal des gaz traités: 200L/mn; Nature des gaz traités: SiH4, NH3, SiHCl2, HCl.

Max gas flow: 200L/mn; Treated gases: SiH4, NH3, SiHCl2, HCl

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