Picture of Paillasse Chime EJM-1 (F-FRAI)
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Clean bench -  EJM

Cleaning bench for handling III/V wafer for MBE412 purpose.

This bench is devoted to the MBE 412 equipement only. As a consequence no particles generating processes (such as lift-offs, or OTS surface treatments), and no acids or solvents process is allowed on this bench.


Paillasse -  EJM

Paillasse pour la manipulation des substrat du bâtis MBE412 uniquement.

Ce banc est dédié aux processes liées au MBE412 uniquement. En conséquence, aucun processus pouvant générer des particules (tels que le lift off ou les traitements de surface OTS) , utilisation d'acides ou de solvants n'est autorisé sur ce banc.



Tool name:
Paillasse Chime EJM-1 (F-FRAI)
Photolithographies (Bât F)
Epitaxie / Epitaxy
Paillasse PVC LAAS

Préparation des substrats avant introduction dans MBE412

Substrate preparation before introduction in MBE412 equipment


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