Picture of Varian Evaporation (D-PRST) NoMOS
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Evaporation thermique : il consiste à chauffer par canon à éléctrons un matériau qui, vaporisé, va se déposer sur un substrat.


Thermal evaporation: it consists in heating by electron gun a material which, vaporized, will be deposited on a substrate.

Tool name:
Varian Evaporation (D-PRST) NoMOS
PVD (Bât F)
MTB Solutions
Varian 3616
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10 hours
Max booking time, night:
0 hours
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Il y a la possibilté de créer une ou plusieurs couches.

Les métaux utilisés dans ce bâti sont :

  • Ti, Au, Pt, Cr et Cu


There is the possibility of creating one or more layers.

Metals used in this system are:

  • Ti, Au, Pt, Cr and Cu


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