Picture of Four Alox (T-FOUR)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Guilhem Almuneau
2nd Responsible:
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Description

Four d'oxydation thermique humide de composés III-V à base d'Aluminium : AlGaAs

Capacité : jusqu'à 4 pouces

Details
Tool name:
Four Alox (T-FOUR)
Area/room:
Traitements thermiques/thermal treament (Bâts F et
Category:
Oxydation
Manufacturer:
AET
Model:
Four d'oxydation
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Tool Modes
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