Picture of Grinder G&N MOS (A-POLI)
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Grinder G&N

Permet l'amincissement de substrats de Silicium, verre, métaux ETC...

Il est possible d'amincir simultanément 5 substrats de 4" ou 3 substrats de 6".

les échantillons sont maintenus sur les plateaux par le vide et durant l'amincissement un jet d'eau  DI est orienté sur les substrats afin d'évacuer les poussieres.

Un large choix de meules est porposées par le fournisseur offrant ainsi la possiblité d'adapter tres finement la meule au substrat à amincir.

La limite d'amincissement pour du verre ou du Si est de 100 µm.

Grinder G&N

Allows the substrates thinning  of Silicon, glass, metals ETC ...

It is possible to simultaneously thin 5 substrates of 4 "or 3 substrates of 6". the samples are held on the chuck by the vacuum and during thinning a jet of water DI is oriented on the substrates to remove the dust. A wide choice of grinding wheels is provided by the supplier thus offering the possibility of very finely adapting the grinding wheel to the substrate to be thinned. The thinning limit for glass or Si is 100 μm.


Tool name:
Grinder G&N MOS (A-POLI)
Assemblage (Bât G)
Assemblage / Device mounting
MPS2 R300 D CS
Max booking time, day:
8 hours
Max booking time, night:
0 hours
No. of future bookings:


  • Drive motor  2,2 kW
  • Spindle speed 2650 rpm
  • Power connection 3,2 kW
  • Precision 3 µm
  • Diamond grinding wheel 175 x 40 x 76 mm
  • Rotary table 300 mm
  • Rotary table speed 0-30 rpm
  • Vacuum chucks 18 x 2" ; 8 x 3"; 5 x 4"; 3 x 5";2 x 6"00 mm
  • Fine infeed 
  • range 12 mm
  • min. step 1 µm


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