Picture of MEB S-3700N (C- MEB)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Benjamin Reig
2nd Responsible:
Franck Carcenac
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Description

Le MEB S-3700N est un microscope électronique à balayage à pression variable pour l'analyse des composants lors des process de fabrication.

---English---

The SEM S-3700N is an Scanning Electron Microscope with variable pressure for the analysis of component during the production step.

Details
Tool name:
MEB S-3700N (C- MEB)
Area/room:
Caractérisation / Characterization (bat G1)
Category:
Caractérisation / characterization
Manufacturer:
HITACHI
Model:
S-3700N
Validated processes informations

Il est possible de choisir une pression allant du Pa à 200Pa et de régler la tension d'accélération de 500 à 30kV. La résolution maximale est de l'ordre de la centaine de nm.

Il est possible d'observer des échantillons allant jusqu'a 6".

---English---

It is possible to choose a variable pressure until 200Pa and to tune the acceleration voltage from 500 Volts to 30kV. The maximal resolution is around hundred of nanometer. 

It is possible to image from millimeter to 6" sample.

Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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