Picture of HMDS Primer oven MOS (F-FRAI)
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Yes automatic HMDS treatment system used at LAAS-CNRS since 2005.

 

Tool name:
HMDS Primer oven MOS (F-FRAI)
Area/room:
Photolithographies (Bât F)
Category:
Photolithographie / Photolithography
Manufacturer:
Yes
Model:
Yes

Allow contact angle beetween 45-65°.

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