Picture of étuve HMDS auto
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2nd Responsible:
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Yes automatic HMDS treatment system used at LAAS-CNRS since 2005.

Allow contact angle beetween 45-65°.

Tool name:
étuve HMDS auto
Area/room:
Photolithographies (Bât F)
Category:
Photolithographie / Photolithography
Manufacturer:
Yes
Model:
Yes
Max booking time, day:
4 hours
Max booking time, night:
12 hours
No. of future bookings:

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