Picture of MBE32P (M32)
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MBE32P is a Molecular Beam Epitaxy system comprised of differents measurement tools, such as:

- bandiT,

- mass spectrometer,

- Auger electron spectrometer,

The MBE32 is running with 8 cells : Ga, In, Al, As, Bi, Be, Si, N/H

and allows 2"/3" wafers.

 

 

 

 

Le MBE32 P est un bâti d'épitaxie équipé de différents outils de caractérisation tels que :

- bandiT,

- mass spectrometer,

- Auger electron spectrometer,

Ce bâti est équipé de 8 cellules : Ga, In, Al, As, Bi, Be, Si, N/H

Il peut acceuillir des substrats  2" et 3" .

 

 

 

 

Tool name:
MBE32P (M32)
Area/room:
EJM/MBE (Bât G2)
Category:
Epitaxie / Epitaxy
Manufacturer:
RIBER SA
Model:
MBE32P
Max booking time, day:
12 hours
Max booking time, night:
0 hours
No. of future bookings:

Is actually mainly use for resarches on Bi integration in III/V crystals.

Il est actuellement utilisé pour des recherches sur l'intégration de Bi dans des structures III/V

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