Picture of DILASE 650 (L-DILA)
Current status:
AVAILABLE
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Système d'insolation laser UV

UV laser insolation system

Tool name:
DILASE 650 (L-DILA)
Area/room:
Lithographie laser : Laser Lithography (Bât G1)
Category:
Lithographie laser / Laser lithography
Manufacturer:
KLOE
Model:
DILASE 650
Max booking time, day:
14 hours
Max booking time, night:
10 hours
No. of future bookings:

Ecriture directe sur échantillons de tailles comprises entre 2 et 150 mm

Direct writing on samples with sizes between 2 and 150 mm

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Licensed Users

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