Picture of DILASE 650 NoMOS (L- 2D)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Pierre-François Calmon
2nd Responsible:
David Colin
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Description

Système d'insolation laser UV

UV laser insolation system

Details
Tool name:
DILASE 650 NoMOS (L- 2D)
Area/room:
Lithographie laser : Laser Lithography (Bât G1)
Category:
Lithographie laser / Laser lithography
Manufacturer:
KLOE
Model:
DILASE 650
Validated processes informations

Ecriture directe sur échantillons de tailles comprises entre 2 et 150 mm

Direct writing on samples with sizes between 2 and 150 mm

Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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