Picture of wet bench III-V
Current status:
AVAILABLE
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Wet bench for the use of harmless chemicals, for instance etching of GaAs with citric acid/H2O2 mixtures

Tool name:
wet bench III-V
Area/room:
Chimie / Chemistry (Bât F)
Category:
Procédés humides / Wet process benches
Manufacturer:
Coillard
Model:
to be checked
Max booking time, day:
12 hours
Max booking time, night:
12 hours
No. of future bookings:

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